June 2019

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Active Illumination Focus Variation

Optical metrology

In this paper, we show the development of an Active illumination Focus Variation on an existing confocal microscope using Microdisplay Scanning technology.

High-speed, roll to roll coherence scanning interferometry in a laser texturing process

Optical metrology

We have developed a miniaturized optical sensor head that integrates Coherence Scanning Interferometry (CSI) allowing to adapt the lateral resolution to the laser texturing process. Reduced [...]

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