Dimensions
mm (inches)
Weight: 8.3 Kg (18.4 lbs)
Technologies
Light sources
630 nm
530 nm
460 nm
575 nm
Objective lenses
| MAG | 5X | 10X | 20X | 50X | 100X | 150X |
| NA | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 | 0.90 |
| WD (mm) | 23.5 | 17.5 | 4.5 | 1.0 | 1.0 | 1.5 |
| FOV1 (µm) | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 | 113 x 94 |
| Spatial sampling2 (µm) | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 | 0.05 |
| Optical resolution3 (µm) | 0.94 | 0.47 | 0.31 | 0.18 | 0.16 | 0.16 |
| System noise4 (nm) | 100 | 30 | 8 | 4 | 3 | 2 |
| Maximum slope5 (º) | 9 | 17 | 27 | 53 | 64 | 64 |
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 6756 x 5652 | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 |
| Spatial sampling2 (µm) | 2.76 | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 |
| Optical resolution3 (µm) | 1.87 | 1.08 | 0.47 | 0.35 | 0.26 | 0.20 |
| System noise4 (nm) | PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
Z performance
| Z | COARSE (Linear stage) | FINE (Piezoelectric scanner with capacitive sensor) |
| Vertical range | 40 mm | 200 µm |
| Resolution | 5 nm | 1.25 nm |
Accuracy and repeatability
| Standard | Value | U, σ | Technique |
| Step height | 48600 nm | U=300 nm, σ= 10 nm | Confocal & CSI |
| 7616 nm | U=79 nm, σ= 5 nm | Confocal & CSI | |
| 941.6 nm |
U=7 nm, σ= 1 nm | Confocal & CSI | |
| 186 nm | U=4 nm, σ= 0.4 nm | Confocal & CSI | |
| 44.3 nm | U=0.5 nm, σ= 0.1 nm | PSI | |
| 10.8 nm | U=0.5 nm, σ= 0.05 nm | PSI | |
| Areal roughness (Sa)7 | 0.79 µm | U=0.04 µm, σ=0.0005 µm | Confocal, AiFV & CSI |
| Profile roughness (Ra)8 | 2.40 µm | U=0.03 µm, σ= 0.002 µm | Confocal, AiFV & CSI |
| 0.88 µm | U=0.015 µm, σ= 0.0005 µm | Confocal, AiFV & CSI | |
| 0.23 µm | U=0.005 µm, σ= 0.0002 µm | Confocal, AiFV & CSI |
Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm. 8 Profile of 4mm length.
Certification
It has been carefully engineered to be compatible with ISO Class 1 and ESD compatible.
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