January 2004

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By Roger Artigas

Optical metrology

23 January, 2004

Dual-technology optical sensor head for 3D surface shape measurements on the micro and nano-scales

The advantages of confocal technology in combination with interference techniques provide a unique wide spectrum of applications, a real breakthrough in non-contact optical profiling on the micro [...]

By Roger Artigas

Optical metrology

6 January, 2004

3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head

We introduce a new dual-technology (confocal & interferometer) illumination hardware setup, in this paper.

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