The S neox Grand Format offers a complete solution, from the hardware to the software perspective, for 3D surface measurements of large panels in semiconductor, display, and PCB industries.
REMOVE WEIGHT LIMITATIONS
Unlimited measurement capabilities
Expansive 600 x 600 mm travel range with an impressive speed of one meter per second. Close-loop XY gantry design for consistent performance regardless of sample weight.
Expansive 600 x 600 mm travel range with an impressive speed of one meter per second. Close-loop XY gantry design for consistent performance regardless of sample weight.
ENHANCED SAFETY
Certified for semiconductor characterization
This system has been carefully designed to meet several industry standards, like the SEMI S2 and S8, and has also been certified by TÜV Rheinland.
3-in-1 TECHNOLOGIES
Highest measurement versatility
The measuring sensor, the S neox Cleanroom, provides three different optical technologies to image with the most suitable technology for each specific sample, achieving precision down to subnanometer levels.
3-in-1 TECHNOLOGIES
Highest measurement versatility
The measuring sensor, the S neox Cleanroom, provides three different optical technologies to image with the most suitable technology for each specific sample, achieving precision down to subnanometer levels.
STRICTEST CLASSIFICATION ISO Class 1
Cleanroom-friendly
The measuring sensor is Class 1 compatible. The enclosure is made of stainless steel, minimizing particle emissions.
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a direct contact near you.
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