Profiler technologies
Light sources
630nm
530nm
460nm
575nm
Dimensions
mm (inch)
mm (inch)
Objective lenses
| MAG | 5X | 10X | 20X | 50X | 100X | 150X |
| NA | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 | 0.90 |
| WD (mm) | 23.5 | 17.5 | 4.5 | 1.0 | 1.0 | 1.5 |
| FOV1 (µm) | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 | 113 x 94 |
| Spatial sampling2 (µm) | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 | 0.05 |
| Optical resolution3 (µm) | 0.94 | 0.47 | 0.31 | 0.18 | 0.16 | 0.16 |
Confocal / Ai Focus Variation
| System noise4 (nm) | 100 | 30 | 8 | 4 | 3 | 2 |
| Maximum slope5 (º) | 9 | 17 | 27 | 53 | 64 | 64 |
| MAG | 5X | 10X | 20X | 50X | 100X | 150X |
| System noise4 (nm) | 100 | 30 | 8 | 4 | 3 | 2 |
| Maximum slope5 (º) | 9 | 17 | 27 | 53 | 64 | 64 |
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 6756 x 5652 | 3378 x 2826 | 1689 x 1413 | 845 x 707 | 338 x 283 | 169 x 141 |
| Spatial sampling2 (µm) | 2.76 | 1.38 | 0.69 | 0.34 | 0.13 | 0.07 |
| Optical resolution3 (µm) | 1.87 | 1.08 | 0.47 | 0.35 | 0.26 | 0.20 |
PSI / ePSI / CSI
| System noise4 (nm) | PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| System noise4 (nm) | PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm | |||||
| Maximum slope5 (º) | 4 | 7 | 17 | 24 | 33 | 44 |
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
Gantry XY stage
| Positioning system | Two axes Gantry: XY translation of the head |
| Travel range (mm) | 600 x 600 |
| Travel speed | Max. 1m/s |
| Control type | Linear close loop |
Certification
This system has been carefully designed to meet several industry standards, like the SEMI S2 and S8, and has also been certified by TÜV Rheinland.
The S neox Cleanroom sensorhead has been carefully engineered to be compatible with ISO Class 1 and ESD compatible.
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