案例研究
就地计量学用于CMP中的垫面监测
鉴于CMP过程中表面之间的机械相互作用是该过程所有阶段的关键变量,因此对于CMP过程的表面测量的需求是显而易见的。在整个过程中需要定期进行表征的表面包括调节盘表面、晶圆表面和垫片表面。
案例研究
鉴于CMP过程中表面之间的机械相互作用是该过程所有阶段的关键变量,因此对于CMP过程的表面测量的需求是显而易见的。在整个过程中需要定期进行表征的表面包括调节盘表面、晶圆表面和垫片表面。
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