We have developed a miniaturized optical sensor head that integrates Coherence Scanning Interferometry (CSI) allowing to adapt the lateral resolution to the laser texturing process. Reduced dimensions of the sensor head make possible to integrate it, parallelizing both texturing and measurement.

This paper reports intermediate findings during an ongoing stability test that will run for 24 months.

In this paper we show that the residual flatness error on a reference sphere measured with a 10X can make the measurement of the radius to have up to 10% error.

In this paper we propose the use of a rotational stage with the combination of a slit-confocal imaging system capable of acquiring unrolled confocal images with a line-scan approach while the sample is rotated at constant speed.

In this paper, a new technique to fuse data incoming from a single confocal and focus variation scan is presented.

The Round Robin results show the applicability of the newly developed bio-imaging transfer standard for calibrating 3D optical profilers.