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Optische Metrologie

Wir haben einen Selbstkorrekturalgorithmus entwickelt, der Nichtlinearitätsfehler im Scanmechanismus der 3D-Mikroskopie erheblich reduzieren kann. Der Ansatz ist insofern rechnerisch selbstkorrigierend, als diese Fehler aus denselben Daten berechnet werden, die auch für die 3D-Rekonstruktion verwendet werden.
We propose a method for increasing the speed of topographic imaging by orders of magnitude.
We report the implementation of a technique able to reconstruct surface topographies at high resolution, only from the acquisition of a single camera shot, dropping the need to perform an axial scan. A system prototype is reported and assessed as an ultra-fast optical surface profiler.
We present an optical system that features a large numerical aperture (>0.3) and a wide field of view (2.9 x 2.9) mm, capable of measuring additive manufacturing parts in a single measurement, without the need for lateral stitching to increase the field of view.
We modify a DMD-based optical profiler to enable lateral super-resolution of the image stack and explore how the quality of the 3D surface reconstruction can be improved.