GLOSSARY
3
- 3D Optical Profiler
a
- Accuracy
- Ai Focus Variation
- AiFV
c
- Coherence Scanning Interferometry (CSI)
- CSI
- Confocal
e
- Extended Phase Shifting Interferometry (ePSI)
- ePSI
f
- Field of view (FOV)
- Form
- Fringe Projection
i
- Interferometry
l
- Lateral resolution
m
- Magnification
- Measurement noise
- Metrology
n
- Numerical aperture (NA)
o
- Objectives
- Optical resolution
p
- Phase Shift Interferometry (PSI)
- PSI
- Precision
r
- Repeatability
- Resolution
- Roughness
s
- Spectroscopic Reflectometry
- Surface Texture
- Surface Waviness
w
- Working distance (WD)

