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Optical metrology

We have developed a self-correction algorithm capable of greatly reducing non-linearity errors in the scanning mechanism of 3D microscopy. The approach is computationally self-corrected in the sense that such errors are calculated using the same data that are used for the 3D reconstruction.
We propose a method for increasing the speed of topographic imaging by orders of magnitude.
The contribution offered by this work is an increased understanding of imaging confocal microscopy measurement of metal additive surfaces, along with the establishment of good practice guidance for measurements.
We report the implementation of a technique able to reconstruct surface topographies at high resolution, only from the acquisition of a single camera shot, dropping the need to perform an axial scan. A system prototype is reported and assessed as an ultra-fast optical surface profiler.
We present an optical system that features a large numerical aperture (>0.3) and a wide field of view (2.9 x 2.9) mm, capable of measuring additive manufacturing parts in a single measurement, without the need for lateral stitching to increase the field of view.
We modify a DMD-based optical profiler to enable lateral super-resolution of the image stack and explore how the quality of the 3D surface reconstruction can be improved.