We study how several methods of structured illumination microscopy affect the metrological characteristics of an areal optical profiler.

We try to measure the three dimensional surface texture and shape of aluminium anodized parts with high lateral resolution.

To prove the feasibility of the proposed approach for printing continuous lines free from scalloping and bulging with excellent definition.

We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system.

In this study we compared the results of different optical technologies.

In this paper, we show the development of an Active illumination Focus Variation on an existing confocal microscope using Microdisplay Scanning technology.